Installation fixture for elastomer bands and methods of using the same

ABSTRACT

A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.

FIELD OF THE INVENTION

The present disclosure relates to an installation fixture for installingan elastomer band around a substrate support and methods of using theinstallation fixture.

BACKGROUND

Integrated semiconductor circuits have become the primary components ofmost electronics systems. These miniature electronic devices may containthousands of the transistors and other circuits that make up the memoryand logic subsystems of microcomputer central processing units and otherintegrated circuits. The low cost, high reliability and speed of thesecircuits have led them to become a ubiquitous feature of modem digitalelectronics.

The fabrication of integrated semiconductor circuits typically takesplace in a reactive ion etching system, such as a parallel plate reactoror inductively coupled plasma reactor. A reactive ion etching system mayconsist of an etching chamber with an upper electrode or anode and alower electrode or cathode positioned therein. The cathode is negativelybiased with respect to the anode and the container walls. The wafer tobe etched is covered by a suitable mask and placed directly on thecathode. A chemically reactive gas such as CF₄, CHF₃, CClF₃, HBr, Cl₂and SF₆ or mixtures thereof with O₂, N₂, He or Ar is introduced into theetching chamber and maintained at a pressure which is typically in themillitorr range. The upper electrode is provided with gas hole(s) whichpermit the gas to be uniformly dispersed through the electrode into thechamber. The electric field established between the anode and thecathode will dissociate the reactive gas forming plasma. The surface ofthe wafer is etched by chemical interaction with the active ions and bymomentum transfer of the ions striking the surface of the wafer. Theelectric field created by the electrodes will attract the ions to thecathode, causing the ions to strike the surface in a predominantlyvertical direction so that the process produces well-defined verticallyetched side walls.

Plasmas used for reactive ion etching are highly corrosive species andchamber component surfaces that are exposed to plasmas can degradequickly. Such degradation of chamber components is costly and can leadto contamination of chamber components or to contamination of asubstrate being processed in the chamber. Such degradation requiresreplacement of contaminated chamber components and/or cleaning of thecontaminated chamber components. Such replacement and/or cleaning of thechamber components leads to down-time of the processing chamber.

A substrate support comprising an electrostatic chuck (ESC) forelectrostatically clamping a substrate to the support is one suchchamber component that may undergo degradation due to exposure to aplasma environment. These types of substrate supports typically comprisea number of components adhered to one another. For example, the supportmay comprise a cooling plate, a heater element and/or a ceramic platebonded to one another by a suitable adhesive. To minimize degradationfrom exposure to the plasma environment, it is common to place anelastomer band around these components in order to protect the adhesivefrom direct exposure to the plasma environment, such as described incommonly-owned U.S. Pat. No. 7,431,788. However, the elastomer band isthen directly exposed to the plasma environment and suffers degradationtherefrom. The elastomer band also suffers degradation from compressionforces under operational conditions.

The manner in which an elastomer band is disposed around a substratesupport may also yield localized stresses in the elastomer band, whichleads to the elastomer band being further susceptible to degradationfrom exposure to the plasma environment. Typically, an elastomer band isdisposed around a substrate support by hand in a 5-point star-shapedpattern. Such a disposal pattern creates highly localized stress areasin the elastomer, which are weaker areas in the elastomer and subjectsthese areas to greater mass loss when exposed to a plasma environment,usually leading to cracking of the elastomer.

Thus, there is a need for an improved method of installing an elastomerband around a substrate support such that the elastomer banddemonstrates increased resistance to degradation from exposure to aplasma environment.

SUMMARY

Disclosed herein is an elastomer band installation fixture that installsan elastomer band around a substrate support with increased resistanceto degradation from exposure to a plasma environment and compressionforces. An elastomer band installed around a substrate support with theinstallation fixture disclosed herein thus has a longer operationallifetime, thereby decreasing the frequency in which the elastomer bandneeds to be replaced. Also disclosed herein are methods of using theelastomer band installation fixture to install an elastomer band arounda substrate support.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a cross-sectional view of a processing chamber suitable forplasma etching semiconductor substrates.

FIG. 2 shows a cross-sectional view of a substrate support havingmounting groove therein.

FIG. 3 shows a perspective view of an elastomer band installationfixture.

FIG. 4 shows a cross-sectional view of an elastomer band installationfixture.

FIG. 5 shows a perspective view of a mechanical fastener for securing anelastomer band installation fixture to a substrate support.

FIG. 6 shows a cross-sectional view of an installation fixture securedto a substrate support using mechanical fasteners.

FIG. 7 shows a cross-sectional view of an installation fixture securedto a substrate support using mechanical fasteners with an elastomer banddisposed around an outer circumference of the installation fixture.

FIG. 8 shows a cross-sectional view of how an elastomer band is insertedinto a mounting groove of a substrate support with the installationfixture.

FIG. 9A shows a perspective view of an embedding tool used forcompletely inserting an elastomer band into a mounting groove. FIG. 9Bshows a top view of an embedding tool and elastomer band inserted into amounting groove of a substrate support.

FIG. 10 shows a cross-sectional view of how the embedding tool cancompletely insert an elastomer band into a mounting groove.

DETAILED DESCRIPTION

Substrate supports for reactive ion etch processing chambers typicallyinclude a lower electrode assembly comprising an electrostatic clampinglayer on which a substrate or wafer is clamped during processing in aplasma processing chamber. The lower electrode assembly can also includevarious layers bonded to a temperature controlled base plate. Forexample, the assembly can include an upper ceramic layer incorporatingone or more electrostatic electrodes adhesively bonded to an upper sideof a heater plate, one or more heaters adhesively bonded to a bottom ofthe heater plate, and a temperature controlled base plate (hereafterreferred to as cooling plate) adhesively bonded to the heaters andheater plate. To protect the plasma-exposed adhesive bond layers, anedge seal comprising an elastomer band may be disposed around the bondlayers of the substrate support.

FIG. 1 shows a cross-sectional view of an exemplary plasma reactor 10for etching substrates. As shown in FIG. 1, the plasma reactor 10includes a plasma processing chamber 12, an antenna disposed above thechamber 12 to generate plasma, which is implemented by a planar coil 16.The RF coil 16 is typically energized by an RF generator 18 via amatching network (not shown). Such chambers are called inductivelycoupled plasma (ICP) chambers. To supply process gas to the interior ofthe chamber 12, there is provided a gas distribution plate or showerhead14, which preferably includes a plurality of holes for releasing gaseoussource materials, e.g., the etchant source gases, into the RF-inducedplasma region between the showerhead 14 and a semiconductor substrate orwafer 30 supported on a substrate support 100 comprising lower electrodeassembly 28. While an inductively coupled plasma reactor is shown inFIG. 1, the plasma reactor 10 can incorporate other plasma generatingsources such as capacitive coupled plasma (CCP), microwave, magnetron,helicon, or other suitable plasma generating equipment, in which casethe antenna is omitted.

The gaseous source materials may also be introduced into the chamber 12by other arrangements such as one or more gas injectors extendingthrough the top wall and/or gas ejection ports built into the walls ofchamber 12. Etchant source chemicals include, for example, halogens suchas Cl₂ and BCl₃ when etching through aluminum or one of its alloys.Other etchant chemicals (e.g., CH₄, HBr, HCl, CHCl₃) as well as polymerforming species such as hydrocarbons, fluorocarbons, andhydro-fluorocarbons for side-wall passivation of etched features mayalso be used. These gases may be employed along with optional inertand/or nonreactive gases.

In use, a wafer 30 is introduced into chamber 12 defined by chamberwalls 32 and disposed on the lower electrode assembly 28. The wafer 30is preferably biased by a radio frequency generator 24 (also typicallyvia a matching network). The wafer 30 can comprise a plurality ofintegrated circuits (ICs) fabricated thereon. The ICs, for example, caninclude logic devices such as PLAs, FPGAs and ASICs or memory devicessuch as random access memories (RAMs), dynamic RAMs (DRAMs), synchronousDRAMs (SDRAMs), or read only memories (ROMs). When the RF power isapplied, reactive species (formed from the source gas) etch exposedsurfaces of the wafer 30. The by-products, which may be volatile, arethen exhausted through an exit port 26. After processing is complete,the wafer 30 can be subjected to further processing and eventually dicedto separate the ICs into individual chips.

The plasma exposed surfaces of any plasma confinement apparatus (notshown), chamber wall 32, chamber liner (not shown) and/or showerhead 14can be provided with a plasma sprayed coating 20 with surface roughnesscharacteristics that promote polymer adhesion. In addition, plasmaexposed surfaces of the substrate support 100 can also be provided witha plasma sprayed coating (not shown). In this manner, substantially allsurfaces that confine the plasma will have surface roughnesscharacteristics that promote polymer adhesion. In this manner,particulate contamination inside the reactor can be substantiallyreduced.

It can be appreciated that the reactor 10 can also be used for metal,dielectric and other etch processes. In plasma etch processing, the gasdistribution plate can be a circular plate situated directly below adielectric window in an ICP reactor or form part of an upper electrodeassembly in a CCP reactor called a parallel plate reactor wherein thegas distribution plate is a showerhead electrode oriented parallel to asemiconductor substrate or wafer 30. The gas distributionplate/showerhead electrode contains an array of holes of a specifieddiameter and spatial distribution to optimize etch uniformity of thelayers to be etched, e.g., a photoresist layer, a silicon dioxide layerand an underlayer material on the wafer.

An exemplary parallel-plate plasma reactor that can be used is adual-frequency plasma etch reactor (see, e.g., commonly-owned U.S. Pat.No. 6,090,304, which is hereby incorporated by reference in itsentirety). In such reactors, etching gas can be supplied to a showerheadelectrode from a gas supply and plasma can be generated in the reactorby supplying RF energy at different frequencies from two RF sources tothe showerhead electrode and/or a bottom electrode. Alternatively, theshowerhead electrode can be electrically grounded and RF energy at twodifferent frequencies can be supplied to the bottom electrode.

FIG. 2 shows a cross-sectional view of a portion of substrate support100 having various layers bonded together with exposed bond layerslocated in a mounting groove adapted to receive an edge seal comprisingan elastomeric band. The substrate support 100 may also be adapted toreceive a plurality of mechanical fasteners. Substrate support 100comprises a heater plate 130 comprised of a metal or ceramic. Adhesivebonding layer 120 is disposed below the heater plate 130 and bondsheater plate 130 to cooling plate 110. Another adhesive bonding layer125 is disposed above the heater plate 130 and bonds heater plate 130 toceramic plate 135 incorporating one or more electrostatic clampingelectrodes. Ceramic plate 135 and cooling plate 110 may have portionsthat extend beyond the outermost portions of heater plate 130 andbonding layers 120, 125 to form mounting groove 145. The outermostportions of the heater plate 140 and bond layers 120, 125 aresubstantially aligned with respect to one another. Preferably, ceramicplate 135 has a larger diameter that heater plate 130 and bonding layers120, 125.

In one embodiment, cooling plate 110 can be configured to providetemperature control by the inclusion of fluid channels (not shown)therein through which a temperature controlled liquid can be circulated.The cooling plate 110 is typically a metal base plate which functions asthe lower RF electrode in the plasma chamber. The cooling plate 110preferably comprises an anodized aluminum or aluminum alloy. However, itcan be appreciated that any suitable material, including metallic,ceramic, electrically conductive and dielectric materials can be used.In one embodiment, the cooling plate 110 is formed from an anodizedmachined aluminum block. Alternatively, the cooling plate 110 could beof ceramic material with one or more electrodes located therein and/oron an upper surface thereof. In addition, the cooling plate 110preferably has a uniform thickness from the center to the outer edge ordiameter thereof and is preferably a thin circular plate. The coolingplate 110 may comprise a series of though-holes 140 for receivingmechanical fasteners which fasten substrate support 100 to theprocessing chamber.

The heater plate 130 may be in the form of a metal or ceramic plate withat least one film heater coupled to a bottom of the metal or ceramicplate. The film heater can be a foil laminate (not shown) comprising afirst insulation layer (e.g., dielectric layer), a resistive heatinglayer (e.g., one or more strips of electrically resistive material) anda second insulation layer (e.g., dielectric layer). The insulationlayers preferably consist of materials having the ability to maintainits physical, electrical and mechanical properties over a widetemperature range including resistance to corrosive gases in a plasmaenvironment such as Kapton or other suitable polyimide films. Theresistive heating layer preferably consists of a high strength alloysuch as Inconel or other suitable alloy or anti-corrosion and resistiveheating materials. Typically, the film heater is in the form of alaminate of Kapton, Inconel and Kapton having a total thickness of about0.005 to about 0.009 of an inch and more preferably about 0.007 of aninch thick.

Ceramic layer 135 preferably is an electrostatic clamping layer ofceramic material with an embedded electrode comprised of a metallicmaterial, such as W, Mo etc. In addition, the ceramic layer 135preferably has a uniform thickness from the center to the outer edge ordiameter thereof and is preferably a thin circular plate suitable forsupporting 200 mm, 300 mm or 450 mm diameter wafers. Details of a lowerelectrode assembly having an upper electrostatic clamping layer, heaterlayer and bonding layers are disclosed in commonly owned U.S. PublishedPatent Application 2006/0144516 wherein the upper electrostatic clampinglayer has a thickness of about 0.04 inch, the upper bonding layer has athickness of about 0.004 inch, the heater plate comprises a metal orceramic plate of about 0.04 inch thickness and a heater film of about0.01 inch thickness, and the lower bonding layer has a thickness ofabout 0.013 to 0.04 inch. However, different thicknesses of the clampinglayer, bond layers and heater layer can be selected to achieve desiredprocess results.

Adhesive bonding layers 120 and 125 are preferably formed from a lowmodulus material such as an elastomeric silicone or silicone rubbermaterial. However, any suitable bonding material can be used. It can beappreciated that the thickness of adhesive layers 120 and 125 can varydepending on the desired heat transfer coefficient. Thus, the thicknessthereof can be uniform or non-uniform to provide a desired heat transfercoefficient based on manufacturing tolerances of adhesive bonding layers120 and 125. Typically, the thickness of adhesive bonding layers 120 and125 will vary over its applied area by plus or minus a specifiedvariable. Preferably, if the bond layer thickness does not vary by morethan 1.5 percent, the heat transfer coefficient between components ofthe substrate support 100 can be made substantially uniform. Forexample, for a substrate support comprising an electrode assembly usedin the semiconductor industry, adhesive bonding layers 120 and 125preferably have a chemical structure that can withstand a wide range oftemperatures. Thus, it can be appreciated that the low modulus materialcan comprise any suitable material, or combination of materials, such asa polymeric material compatible with a vacuum environment and resistantto thermal degradation at high temperatures (e.g., up to 500° C.). Inone embodiment, adhesive bonding layers 120 and 125 may comprisesilicone and be between about 0.001 to about 0.050 of an inch thick andmore preferably about 0.003 to about 0.030 of an inch thick.

As shown in FIG. 2, a portion of the cooling plate 110 and ceramic plate135 can extend beyond an outermost portion of the heater plate 130,adhesive bond layers 120 and 125, thereby forming a mounting groove 145in the substrate support 100. The material(s) of adhesive bonding layers120 and 125 are typically not resistant to the reactive etchingchemistry of semi-conductor plasma processing reactors and must,therefore, be protected to accomplish a useful operation lifetime. Toprotect the adhesive bonding layers 120 and 125, it has been proposed toplace an edge seal in the form of an elastomeric band, into the mountinggroove 145 to form a tight seal that prevents penetration of thecorrosive gases of semi-conductor plasma processing reactors. See, forexample, commonly owned U.S. Published Applications 2009/0290145 and2010/0078899.

Typically, such an elastomer band is installed by hand in a 5-pointstar-shaped stretching pattern. In other words, a portion of theelastomer band is inserted into a mounting groove and another portion ofthe elastomer band, generally the portion that is about 144° away fromthe first portion inserted in the mounting groove, is stretched andinserted into the mounting groove. This stretching process is repeatedwith subsequent portions of the elastomer band that are about 144° awayfrom the previously inserted portion until the elastomer band iscompletely inserted into the mounting groove. However, such a method ofinserting the elastomer band leads to highly localized stressed areas inthe elastomer band. These stressed areas are weaker than other areas inthe elastomer band and are subject to greater mass loss when exposed toa plasma environment. The greater mass loss, in turn, leads todegradation, such as cracking, of the elastomer band, therebynecessitating replacement of the elastomer band.

FIG. 3 shows an installation fixture 150 that can be used to relievesuch stressed areas of an elastomer band. Installation fixture 150 maybe annular and adapted to mount an elastomer band in a mounting groovearound a semiconductor substrate support. Using installation fixture 150to install an elastomer band around a substrate support will reducelocal stresses in the elastomer band and reduce the chances of theelastomer band cracking under operational conditions, e.g., when exposedto a plasma environment. This leads to an elastomer band with a longeroperational lifetime when compared to those installed by hand in a5-point star-shaped stretching pattern. Installation fixture 150comprises a plurality of radially extending portions 190 each comprisinga through-hole 200. These radially extending portions 190 are adapted toreceive a plurality of mechanical fasteners at locations correspondingto mounting holes in the semiconductor substrate support. Preferably,installation fixture 150 comprises four radially extending portions 190.The spacing of each radially extending portion 190 around installationfixture 150 is not particularly limited and preferably, each radiallyextending portion 190 is disposed about 72° and 108° from neighboringradially extending portions 190. Alternatively, each radially extendingportion 190 may be disposed about 90° from neighboring radiallyextending portions 190. The inner diameter 112 and outer diameter 114 ofinstallation fixture 150 is not particularly limited, so long asinstallation fixture 150 is sized accordingly with respect to the sizeof the substrate support.

FIG. 4 shows a cross-sectional view of installation fixture 150, whichcomprises an inner portion 155 and an outer portion 170. Inner portion155 is adapted to be located above an outer portion or periphery of anupper surface of substrate support 100. For example, inner portion 155is adapted to be received on and contact ceramic layer 135 at an outerportion or periphery thereof. Inner portion 155 may comprise recesses165 on both horizontal surfaces such that these recesses 165 help withalignment of installation fixture 150 with respect to substrate support100. Un-recessed portions of inner portion 155 may contact an outerperiphery of ceramic layer 135. Recesses 165 also allow for minimizationof contact between the horizontal surfaces of inner portion 155 ofinstallation fixture 150 and the ceramic layer 135 in order to preventcontamination of the ceramic layer 135, which, in turn, preventscontamination of a substrate or wafer surface to be processed. The depthof recesses 165 is not particularly limited, so long as a sufficientspacing is provided between a horizontal surface of inner portion 155disposed closest to the outermost surface of ceramic layer 135. Therecesses 165 may have a depth between about 0.01-0.05 inch. Preferably,recesses 165 have a depth of about 0.025 inch. Portion 157 of innerportion 155 is a horizontal protrusion that increases the rigidity ofinstallation fixture 150 such that the fixture 150 does not bend duringinstallation of elastomer band 250 around substrate support 100. If theinstallation fixture 150 is bent sufficiently during installation, theelastomer band 250 may fall off the fixture 150 or the fixture 150 maybe permanently distorted, necessitating it's replacement. Outer portion170 comprises a vertically extending portion 180 and a radiallyextending portion 190 comprising a through-hole 200. Verticallyextending portion 180 may comprise an angled tip 185 at a free endthereof. Preferably, the angle of the angled tip 185 is between about10°-45° and most preferably, about 20°. The through-holes 200 of theradially extending portion 190 of outer portion 180 are adapted to alignwith though-holes 140 of cooling plate 110. Preferably, installationfixture 150 has an inner diameter 112 with respect to an innermostsurface of inner portion 155 of between about 10.5 to 11.5 inches withrespect a substrate support designed for processing substrates or waferswith a 300 mm diameter. Preferably, inner diameter 112 is about 11.0inches. Preferably, installation fixture has an outer diameter 114 withrespect to an outermost surface of vertically extending portion 180 ofbetween about 11.0 to 12.0 inches with respect a substrate supportdesigned for processing substrates or wafers with a 300 mm diameter.Preferably, outer diameter 114 is about 11.7 inches. With respect toprocessing substrates or wafers with a diameter less than 300 mm, suchas 200 mm, or greater than 300 mm, such as 450 mm, the diameters ofinstallation fixture 150 are scaled accordingly. Outer diameter 114 mayalso be determined by the diameter of elastomer band 250 and the band'sstretching tolerance.

Preferably, installation fixture 150 is made from a low-friction plasticmaterial such as polyethylene terephthalate (PET) or a fluorocarbon,e.g., TEFLON (PTFE—PolyTetraFluoroEthylene, manufactured by DuPont).Alternatively, installation fixture 150 may be made from othermaterials, such as quartz, ceramic, metal or silicon. Methods of makinginstallation fixture 150 are not particularly limited. For example,installation fixture 150 may be machined from a block or annular pieceof starting material. Alternatively, installation fixture 150 may beinjection molded.

FIG. 5 shows a representative mechanical fastener 160 used forrotationally constraining installation fixture 150 with respect tosubstrate support 100. Mechanical fastener 160 may be a locking pinadapted to fit through both through-holes 140 of substrate support 100and through-holes 200 of installation fixture 150. Preferably,mechanical fastener 160 is cylindrical or hemi-cylindrical in shape.Mechanical fastener 160 may comprise a plurality of portions along itslength that have varying diameters. For example, and without limitation,one end portion 162 of mechanical fastener 160 may comprise the largestdiameter, one end portion 166 of mechanical fastener 160 may comprisethe smallest diameter and a central portion 164 may comprise anintermediate diameter. However, mechanical fastener 160 may be shapedother than cylindrical, such as square, tapered or polygonal.Preferably, end surfaces 167 and 168 of mechanical fastener 160 arerecessed and adapted to receive the head of each bolt that fastens thesubstrate support 100 to a work-piece, such as a table or chamber wall.For example, if the bolts that fasten substrate support 100 to thework-piece are dome-shaped, then end surfaces 167 and 168 of mechanicalfastener 160 may be recessed with a similar dome-shape or similarconcavity. If the bolts that fasten substrate support 100 to thework-piece are hexagonally-shaped, then end surfaces 167 and 168 ofmechanical fastener 160 may be recessed with a similar hexagonal shape.Alternatively, installation fixture 150 may be rotationally constrainedwith respect to substrate support 100 by locking pins that press upagainst a work-piece and the installation fixture 150 rather than fitthrough aligned through-holes 200 and 140. When through-holes 200 and140 are aligned, mechanical fastener 160 can be inserted through eachset of aligned through-holes 200 and 140 such that installation fixture150 is rotationally constrained with respect to substrate support 100.The dimensions of mechanical fastener 160 are not particularly limited,so long as it can sufficiently rotationally constrain installationfixture 150 when installed. The length of mechanical fastener 160, fromsurface 167 to surface 168, is preferably between about 1-2 inches. Morepreferably, the length is about 1.4 inches. End portion 162 preferablyhas a length of about 0.3-0.5 inch and, more preferably, about 0.375inch. End portion 166 preferably has a length of about 0.5-0.8 inch and,more preferably, about 0.7 inch. Central portion 164 preferably has alength of about 0.2-0.4 inch and, more preferably, about 0.3 inch. Thediameter of each of these portions are also not particularly limited, solong as end portions 162 and 166 are able to fit within through-hole 140of cooling plate 110 and so long as central portion 164 is able to fitwithin through-hole 200 of the radially extending portion 190 ofinstallation fixture 150.

FIG. 6 shows a cross-sectional view of an embodiment of a beginning stepof a method of installation of an elastomer band as disclosed herein.End portion 162 with the largest diameter of each mechanical fastener160 is secured into each through-hole 140 of cooling plate 110. Next,installation fixture 150 is located over ceramic layer 135 of thesubstrate support 100 such that each radially extending portion 190 withthrough-holes 200 is aligned with each mechanical fastener 160 placedinto each through-hole 140 of cooling plate 110 and un-recessed portionsof inner portion 155 contacts an outer periphery of ceramic layer 135.Installation fixture 150 is then disposed over ceramic layer 135 withangled tip 185 of vertically extending portion 180 facing away fromceramic layer 135, such that the through-holes 200 of installationfixture 150 are disposed around central portions 164 of mechanicalfasteners 160. The installation fixture 150 is now rotationallyconstrained with respect to substrate support 100. An elastomer band 250may now be placed around an outer circumference of vertically extendingportion 180 of installation fixture 150, as indicated by the downwardfacing dashed arrow.

FIG. 7 shows a cross-sectional view of an embodiment of an intermediatestep of a method of installation of an elastomer band as disclosedherein. Elastomer band 250 is placed around an outermost circumferenceof vertically extending portion 180 by stretching the elastomer band 250to fit the circumference. Preferably, elastomer band 250 is notstretched more than 2% of its circumference when placed around anoutermost circumference of vertically extending portion 180, as doing somay permanently distort its elasticity. Angled tip 185 of verticallyextending portion 180 aids in ensuring that elastomer band 250 is notstretched more than 2% of its circumference as well as facilitating thesliding of elastomer band 250 into a mounting groove, such as mountinggroove 145. Elastomer band 250 may be relieved of its localized internalstresses by rotation back and forth around installation fixture 150.Elastomer band 250 may be rotated back and forth around installationfixture 150 by at least about 20°. Preferably, elastomer band 250 isrotated back and forth around installation fixture 150 by at least about20°-90° and more preferably, by at least about 180°. Preferably, therotation back and forth is carried out at least twice, and morepreferably, at least 4-5 times.

FIG. 8 shows a cross-sectional view of an embodiment of a secondintermediate step of a method of installation of an elastomer asdisclosed herein. After elastomer band 250 has been rotated back andforth and its localized internal stresses relieved, installation fixture150 and the mechanical fasteners 160 are inverted 180° about thehorizontal plane of installation fixture 150 and re-secured to substratesupport 100. In other words, installation fixture 150 and the mechanicalfasteners 160 are flipped upside down such that angled tip 185 isdownward facing and proximate mounting groove 145. Un-recessed portionsof inner portion 155 contact an upper surface of an outer periphery ofceramic layer 135. Elastomer band 250 is then slid off of verticallyextending portion 180 of installation fixture 150 and into mountinggroove 145, as indicated by the downward facing dashed arrow.Installation fixture 150 and mechanical fasteners 160 may now be removedfrom substrate support 100.

When the elastomer band 250 has been placed into mounting groove 145, itmay be required to press elastomer band 250 further into mounting groove145. FIG. 9A shows a representative embedding tool 300 that can be usedfor pressing elastomer band 250 further into a mounting groove.Embedding tool 300 may be a curved piece that is less than 4 incheswide, preferably about 2 inches wide. Embedding tool 300 may also beless than 4 inches long, preferably about 2 inches long. Embedding tool300 may also be less than one inch thick, preferably about 0.3-0.5 inchthick. Embedding tool 300 may be comprised of plastic, quartz, ceramic,metal, or silicon. Preferably, embedding tool 300 is comprised of aplastic such as polyetheretherketon (PEEK) or a fluorocarbon, e.g.,TEFLON. Embedding tool 300 may be square or rectangular in shape.Preferably, two opposing side surfaces 301, 302 of tool 300 are curvedin a concave manner to facilitate pressing of elastomer band 250.Preferably, the curved side surfaces 301, 302 have a radius of curvaturethat is substantially the same as the substrate support, as shown inFIG. 9B. Side surface 301 may comprise a recess 305 at an inner portionthereof, with radially extending portions 308 at the outer portionsthereof. Each radially extending portion 308 preferably comprises aprojection 310 adapted to press elastomer band 250 further into themounting groove. Side surface 302 may comprises a series of indentations312. Preferably, side surface 302 comprises three indentations 312 thatare equilaterally spaced across side surface 302. Side surface 302 isadapted to be pressed across the elastomer band 250 to further compresselastomer band 250 into the mounting groove to ensure that elastomerband 250 does not substantially extend beyond the mounting groove it isinserted into.

FIG. 10 shows a cross-sectional view of an embodiment of a final step ofa method of installation of an elastomer band as disclosed herein. Afterelastomer band 250 has been inserted into a mounting groove, projections310 of radially extending portions 308 of side surface 301 of embeddingtool 300 may be moved along the outward facing surface of elastomer band250 to press against elastomer band 250 and further insert elastomerband 250 into the mounting groove. Afterwards, side surface 302 ofembedding tool 300 may be moved along the outward facing surface ofelastomer band 250 and an outer surface of cooling plate 110 to ensurethat elastomer band 250 does not substantially extend beyond themounting groove it is inserted into.

Thus, a method of installing an elastomer band 250 as a protective edgeseal around a portion of a substrate support 100 used for supporting asemiconductor substrate in a plasma processing chamber may be summarizedas follows: a) disposing an elastomer band 250 around a verticallyextending portion 180 of installation fixture 150; and b) sliding theelastomer band 250 off the vertically extending portion 180 of theinstallation fixture 150 and into a mounting groove 145 in the substratesupport 100 adapted to receive the elastomer band 250.

The method may further optionally comprise the following steps of, priorto step a) above, securing a substrate support 100 to a work-piece, suchas a table or a processing chamber wall, disposed inside or outside of aprocessing chamber; securing the installation fixture 150 to thesubstrate support 100 with at least one mechanical fastener 160 suchthat the installation fixture 150 is rotationally constrained withrespect to the substrate support 100 and such that vertically extendingportion 180 of installation fixture 150 faces away from the substratesupport 100. The method may further optionally comprise the followingsteps of, between steps a) and b) above, rotating the elastomer band 250around the vertically extending portion 180 of the installation fixture150; positioning the installation fixture 150 such that the verticallyextending portion 180 of the installation fixture 150 faces thesubstrate support 100; and securing the installation fixture 150 to thesubstrate support 100 while the vertically extending portion 180 of theinstallation fixture 150 faces the substrate support 100. The method mayfurther optionally comprise the following step of, after step b) above,pressing a tool 300 against the elastomer band 250 and compressing theelastomer band 250 into the mounting groove 145 such that the elastomerband 250 is completely inserted into mounting groove 145.

It is noted that the method described above installs elastomer band 250around a substrate support 100 while the substrate support is disposedeither inside or outside a processing chamber. Due to ease ofinstallation, it is preferable to install elastomer band 250 aroundsubstrate support 100 while substrate support 100 is disposed outside ofa processing chamber. For example, when outside of a processing chamber,substrate support 100 may be mechanically fastened to a work-piece, suchas a table, for installation of elastomer band 250. When inside of aprocessing chamber, substrate support 100 may also be mechanicallyfastened to a work-piece, such as a chamber wall, for installation ofelastomer band 250.

The method described above may be carried out with an elastomerinstallation kit comprising: a) a plurality of mechanical fasteners eachcomprising at least three portions with different diameters; b) anannular installation fixture comprising an inner portion adapted to belocated above an outermost top surface of a substrate support and anouter portion surrounding the inner portion, the outer portioncomprising a vertically extending portion adapted to receive anelastomer band and a plurality of radially extending portions adapted toreceive a plurality of mechanical fasteners; and c) a curved embeddingtool adapted to press an elastomer band into a mounting groove in asubstrate support, the tool comprising two opposing surfaces that arecurved in a concave manner, wherein one curved surface comprises arecess at an inner portion thereof with radially extending portions atouter portions thereof, each radially extending portion comprising aprojection; and wherein the opposing curved surface comprises a seriesof equilaterally spaced indentations.

The use of installation fixture 150, mechanical fasteners 160 andembedding tool 300 to install an elastomer band around a substratesupport can provide advantages over elastomer bands installed by themore traditional “5-point star-shaped pattern.” For example, elastomerbands installed as disclosed herein can provide increased serviceabilityof a substrate support disposed in chambers such as plasma etchchambers. This increased serviceability results from increasedresistance to corrosive plasma environments, which leads to a reducedtendency of the elastomer band to crack under operational conditions,e.g., plasma etching. Elastomer bands installed as disclosed herein havean operational lifetime that is about twice that of elastomer bandsinstalled by the more traditional “5-point star-shaped pattern.”

The elastomer band 250 can be constructed from any suitablesemiconductor processing compatible material. For example, elastomerband 250 is preferably constructed of curable fluoroelastomericfluoropolymers (FKM) capable of being cured to form a fluoroelastomer orcurable perfluoroelastomeric perfluoropolymers (FFKM) can be used. Theelastomer band 250 is preferably comprised of a material having highchemical resistance, low and high temperature capability, resistance toplasma erosion in a plasma reactor, low friction, and electrical andthermal insulation properties. A preferred material is aperfluoroelastomer having a Shore A durometer hardness including, butnot limited to, 60 to 85 and a specific gravity including, but notlimited to 1.9 to 2.1 such as PERLAST available from Perlast Ltd.Another band material is KALREZ available form DuPont PerformanceElastomers. PERLAST and KALREZ are FFKM elastomers. The shape of theelastomer band 250 is also not particularly limited and the elastomerbands may be circular, square or rectangular in cross-section. Theelastomer bands 250 may also have an irregularly shaped cross-section,such as rectangular cross-section with a concave outer surface asdisclosed in commonly owned U.S. application Ser. No. 13/277,873, filedOct. 20, 2011.

It can be appreciated that a substrate support comprising an elastomerband installed as disclosed herein using installation fixture 150,mechanical fasteners 160 and embedding tool 300 to install an elastomerband around a substrate support can be adapted in any new processingchamber suitable for plasma processing semiconductor substrates oradapted to retrofit existing processing chambers. It should beappreciated that in a specific system, the specific shape of the ceramicplate 135, the cooling plate 110 and the heater plate 130 may varydepending on the arrangement of chuck, substrate and/or othercomponents. Therefore, the exact shape of the ceramic plate 135, thecooling plate 110 and the heater plate 130 as shown in FIGS. 2, 6-8 and10 are shown for illustration purposes only and are not limiting in anyway. It can also be appreciated that, if desired, the elastomer band 250can be placed around a substrate support 100 prior to the substratesupport 100 being completely assembled. In other words, elastomer band250 can be placed around a substrate support 100 when ceramic plate 135is an upper surface of substrate support 100 or when heater plate 130 isan upper surface of substrate support 100. For example, elastomer band250 can be installed around substrate support 100 prior to ceramic layer135 being installed on the substrate support 100. Accordingly,installation fixture 150 can be disposed over heater plate 130 as theupper surface of substrate support 100, which typically has a smallerdiameter than ceramic plate 135. In such a case, inner diameter 112 ofinstallation fixture 150 is equal to or greater than the diameter ofheater plate 130.

Although the present invention has been described in connection withpreferred embodiments thereof, it will be appreciated by those skilledin the art that additions, deletions, modifications, and substitutionsnot specifically described can be made without departing from the spiritand scope of the invention as defined in the appended claims.

What is claimed is:
 1. An annular installation fixture adapted to mountan elastomer band in a mounting groove around a semiconductor substratesupport used for supporting a semiconductor substrate in a plasmaprocessing chamber, the annular installation fixture comprising: aninner portion adapted to be located above an outer portion of an uppersurface of the semiconductor substrate support; a vertically extendingportion adapted to receive the elastomer band; and a plurality ofradially extending portions extending outward from the verticalextending portion and adapted to receive a plurality of mechanicalfasteners at locations corresponding to mounting holes in thesemiconductor substrate support.
 2. The annular installation fixture ofclaim 1, wherein the vertically extending portion has an angled tip at afree end thereof.
 3. The annular installation fixture of claim 1,wherein the annular installation fixture is comprised of plastic,quartz, ceramic, metal or silicon.
 4. The annular installation fixtureof claim 1, wherein the annular installation fixture is comprised ofplastic.
 5. The annular installation fixture of claim 4, wherein theplastic comprises a fluorocarbon.
 6. An elastomer band installation kitcomprising: a) an annular installation fixture adapted to mount anelastomer band in a mounting groove around a semiconductor substratesupport, the annular installation fixture comprising: an inner portionadapted to be located above an upper surface of the semiconductorsubstrate support; a vertically extending portion adapted to receive theelastomer band; and a plurality of radially extending portionscomprising through-holes adapted to receive mechanical fasteners atlocations corresponding to mounting holes in the semiconductor substratesupport; b) a curved embedding tool adapted to press the elastomer bandinto the mounting groove in the semiconductor substrate support, thetool comprising two opposing surfaces that are curved in a concavemanner, wherein one curved surface comprises a recess at an innerportion thereof with radially extending portions at outer portionsthereof, each radially extending portion comprising a projection; andwherein the opposing curved surface comprises a series of equilaterallyspaced indentations; and c) a plurality of mechanical fasteners eachadapted to fit through through-holes of the semiconductor substratesupport and through the through-holes of the annular installationfixture.
 7. The elastomer band installation kit of claim 6, wherein thevertically extending portion of the annular installation fixture has anangled tip.
 8. The elastomer band installation kit of claim 6, whereinthe annular installation fixture is comprised of a low-friction plasticmaterial.
 9. The elastomer band installation kit of claim 6, wherein theannular installation fixture is comprised of polyethylene terephthalate(PET) or polytetrafluoroethylene (PTFE).
 10. The elastomer bandinstallation kit of claim 6, wherein the curved embedding tool iscomprised of polyetheretherketon (PEEK) or polytetrafluorothylene(PTFE).
 11. The annular installation fixture of claim 1, wherein theinner portion has a pair of recesses, which are configured to assistwith alignment of annular installation fixture with respect to thesemiconductor substrate support.
 12. The annular installation fixture ofclaim 11, comprising: an un-recessed portion of the inner portionconfigured to contact an outer periphery of a ceramic layer of thesemiconductor substrate support.
 13. The annular installation fixture ofclaim 1, wherein the inner portion comprises a horizontal protrusionextending radially inward.
 14. The annular installation fixture of claim1, wherein the plurality of radially extending portions comprises fourradially extending portions disposed about 72 degrees to about 108degrees from a neighboring radially extending portion.
 15. An annularinstallation fixture adapted to mount an elastomer band in a mountinggroove around a semiconductor substrate support used for supporting asemiconductor substrate in a plasma processing chamber, the annularinstallation fixture comprising: an inner portion adapted to be locatedabove an outer portion of an upper surface of the semiconductorsubstrate support; a vertically extending portion adapted to receive theelastomer band; a plurality of radially extending portions adapted toreceive a plurality of mechanical fasteners at locations correspondingto mounting holes in the semiconductor substrate support; and whereinannular installation fixture is an annular ring.
 16. The annularinstallation fixture of claim 15, wherein the annular ring has an innerdiameter at an innermost surface of about 10.5 to about 11.5 inches andan outer diameter at an outermost surface of the vertically extendingportion of about 11.0 to about 12.0 inches.
 17. The elastomer bandinstallation kit of claim 6, wherein the inner portion has a pair ofrecesses, which are configured to assist with alignment of annularinstallation fixture with respect to the semiconductor substratesupport.
 18. The elastomer band installation kit of claim 6, anun-recessed portion of the inner portion configured to contact an outerperiphery of a ceramic layer of the semiconductor substrate support. 19.The elastomer band installation kit of claim 6, wherein the innerportion comprises a horizontal protrusion extending radially inward. 20.The elastomer band installation kit of claim 6, wherein the plurality ofradially extending portions comprises four radially extending portionsdisposed about 72 degrees to about 108 degrees from a neighboringradially extending portion.